1J3-1 Experimental Results of Gravity Sensor using AT-cut Quartz Crystal MEMS Resonator(Piezoelectric Devices (Bulk wave devices, Surface wave devices))

Takeru Mutoh; Mitsuaki Koyama; Takao Aizawa; Toshifumi Matsuoka

doi:10.24492/use.32.0_1

Proceedings of Symposium on Ultrasonic Electronics

Online ISSN : 2433-1910
Print ISSN : 1348-8236

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1J3-1 Experimental Results of Gravity Sensor using AT-cut Quartz Crystal MEMS Resonator(Piezoelectric Devices (Bulk wave devices, Surface wave devices))

Takeru Mutoh, Mitsuaki Koyama, Takao Aizawa, Toshifumi Matsuoka

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2011 Volume 32 Pages 1-2

DOI https://doi.org/10.24492/use.32.0_1

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