Abstract
ZnO films with c-axis (0002) orientation have been successfully grown by RF magnetron sputtering on interdigital transducers (IDTs)/Al_2O_3/glass substrates. The alumina films were deposited on glass substrates by electron beam evaporation. The phase velocity, coupling coefficient and temperature coefficient of frequency (TCF) of SAW device were increased when we increased the thickness of alumina film. The experimental result is beneficial to upgrade the performance of the ZnO thin film SAW devices on cheap glass substrate.
