2Pb3-5 Optimization of SiO_2 Films and Application of Fluorine Doped SiO_2 Films for Temperature Compensated Surface Acoustic Wave Devices(Poster Session)

S. Matsuda; M. Hara; M. Miura; T. Matsuda; M. Ueda; Y. Satoh; K. Hashimoto

doi:10.24492/use.32.0_221

Proceedings of Symposium on Ultrasonic Electronics

Online ISSN : 2433-1910
Print ISSN : 1348-8236

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2Pb3-5 Optimization of SiO_2 Films and Application of Fluorine Doped SiO_2 Films for Temperature Compensated Surface Acoustic Wave Devices(Poster Session)

S. Matsuda, M. Hara, M. Miura, T. Matsuda, M. Ueda, Y. Satoh, K. Hashimoto

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JOURNAL FREE ACCESS

2011 Volume 32 Pages 221-222

DOI https://doi.org/10.24492/use.32.0_221

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