1P3-5 Sputter Deposition of ScAlN Thin Films Using a Sc-Al Alloy Target(Poster Session)
Masahiro Sumisaka, Satoshi Fujii, Gonbin Tang, Yu Suzuki, Shohei Otomo, Tatsuya Omori, Ken-ya Hashimoto
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2014 Volume 35 Pages 87-88
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Article 1st page
