Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
1P3-9 Development of Friction Drive MEMS Rotary Actuator Using Multilayer Piezoelectric Element(Poster Session)
Hirozumi Oku, Masaki Tatani, Minami Takato, Ken Saito, Fumio Uchikoba
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2014 Volume 35 Pages 95-96

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© 2014 Institute for Ultrasonic Elecronics
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