Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
3J3-2 Growth of c-axis parallel oriented ScAlN films by ion-beam assisted sputtering and their application in pure shear mode resonators
Mineki Oka, Shinji Takayanagi, Takahiko Yanagitani, Mami Matsukawa
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2015 Volume 36 Pages _3J3-2-1_-_3J3-2-2_

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© 2015 Institute for Ultrasonic Elecronics
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