Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
3P3-2 Effect of Sc concentration on quasi-shear mode electromechanical coupling k'_<15> in c-axis tilted ScAlN films
Masashi Suzuki, Takahiko Yanagitani
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2015 Volume 36 Pages _3P3-2-1_-_3P3-2-2_

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© 2015 Institute for Ultrasonic Elecronics
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