1J2-3 Analysis of sound and temperature fields in ultrasonic beam induced resistance change (SOBIRCH) method aiming to failure analysis for semiconductor devices

Takuto Matsui; Kousuke Tatsumi; Tomohiro Kawashima; Yoshinobu Murakami; Naohiro Hozumi; Shigeru Eura; Toru Matsumoto

doi:10.24492/use.39.0_1J2-3

Proceedings of Symposium on Ultrasonic Electronics

Online ISSN : 2433-1910
Print ISSN : 1348-8236

1J2-3 Analysis of sound and temperature fields in ultrasonic beam induced resistance change (SOBIRCH) method aiming to failure analysis for semiconductor devices

Takuto Matsui, Kousuke Tatsumi, Tomohiro Kawashima, Yoshinobu Murakami, Naohiro Hozumi, Shigeru Eura, Toru Matsumoto

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2018 Volume 39 Article ID: 1J2-3

DOI https://doi.org/10.24492/use.39.0_1J2-3

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