Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
1J3-3 A new electromechanical coupling coefficient extraction method of as-grown film/wafer structure by using the ratio of overtone mode resonant frequencies
Makoto TotsukaTakahiko Yanagitani
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2018 Volume 39 Article ID: 1J3-3

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© 2018 Institute for Ultrasonic Elecronics
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