Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
2P3-7 c-Axis tilted ScAlN film shear mode resonators for detection of biomolecular interactions
Hana Yazaki, Takumi Soutome, Rei Karasawa, Shinji Takayanagi, Kenji Yoshida, Takahiko Yanagitani
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2018 Volume 39 Article ID: 2P3-7

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© 2018 Institute for Ultrasonic Elecronics
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