Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
2P3-9 Wireless MEMS Quartz Crystal Microbalance Sensor Chip Fabricated by Wafer-Level Packaging Process
Fumihito KatoFumiya KawashimaTomoyuki NonakaAkimi UchidaHirotsugu Ogi
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2018 Volume 39 Article ID: 2P3-9

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© 2018 Institute for Ultrasonic Elecronics
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