Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
2P1-6 Piezoelectric Characteristics of c-Axis Oriented CrAlN Films Grown by RF Magnetron Sputtering
Yusei Takano, Ryusei Hayakawa, Masashi Suzuki, Shoji Kakio
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2019 Volume 40 Article ID: 2P1-6

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© 2019 Institute for Ultrasonic Elecronics
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