Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
2P3-1 Ion beam induced a-axis in-plane oriented (0001) ScAlN thin film
Chiaki Masamune, Takahiko Yanagitani
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2019 Volume 40 Article ID: 2P3-1

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