Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
3P1-4 Improvement of piezoelectric properties in ScAlN film by suppression of highly-energetic-negative-ion bombardment from sputtering target
Shinji Takayanagi, Rui Kihara, Takahiko Yanagitani
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2019 Volume 40 Article ID: 3P1-4

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