Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
1Pb3-2 Increase of electromechanical coupling coefficient in c-axis oriented AlN films by chromium doping at low concentrations
Yusei TakanoMasashi SuzukiShoji Kakio
Author information
JOURNAL FREE ACCESS

2020 Volume 41 Article ID: 1Pb3-2

Details
Article 1st page
Content from these authors
© 2020 Institute for Ultrasonic Elecronics
Previous article Next article
feedback
Top