Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
3J1-1 Fabrication and evaluation of high-order mode solid mounted resonators with polarity inverted GeAlN/AlN multilayered films
Jun Sekimoto, Masashi Suzuki, Shoji Kakio
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2022 Volume 43 Pages 329-

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