Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
3Pb1-2 Effect of particle irradiation direction in magnetron sputtering on piezoelectricity of c-axis parallel oriented ZnO films
Naoki Tomiyama, Shinji Takayanagi, Takahiko Yanagitani
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2022 Volume 43 Pages 413-

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