Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
3Pb3-2 Mechanical Q factor dependence on Zr / Ti ratio of sputter-grown PZT epitaxial thin films
Yuki Shimizu, Takahiko Yanagitani
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2022 Volume 43 Pages 437-

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