Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
1P3-2 Suppression of Higher-Order Modes of SAW Devices on Layered LiTaO3/SiO2/SiN/Si Substrate
Ryo Nakagawa, Motoki Ozasa, Hideki Iwamoto, Akira Michigami
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2023 Volume 44 Pages 34-

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