Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
2P3-1 Use of Periodic 2D Pillar Array for Performance Enhancement of AlN-based SMR BAW Resonators
Hua-yong LuoTing WuZi-jiang YangChang-yu YeJing-fu BaoKen-ya Hashimoto
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2023 Volume 44 Pages 118-

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