Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
3P1-1 Sputtering deposition of c-axis parallel oriented ZnO film with limited particle irradiation and resonance property as shear-mode resonator
Naoki Tomiyama, Shinji Takayanagi, Takahiko Yanagitani
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2023 Volume 44 Pages 175-

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