Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
3P3-6 Substrate temperature dependence of BAW propagation properties on (K,Na)NbO3 films deposited by RF sputtering
Yuta NakayamaMasashi SuzukiShoji Kakio
Author information
JOURNAL FREE ACCESS

2023 Volume 44 Pages 205-

Details
Article 1st page
Content from these authors
© © 2023 Institute for Ultrasonic Elecronics
Previous article Next article
feedback
Top