Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
1P2-6 Development of a Measurement Method of Bulk Acoustic Wave Properties for Thin Films by Ultrasonic Microspectroscopy Technology
Yuji Ohashi, Jun-ichi Kushibiki, Kentaro Totsu, Shigeharu Matsumoto, Takanori Shirai, Yosuke Inase, Hiroaki Takeno, Takahiro Ito
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2024 Volume 45 Pages 25-

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