1P3-4 Intrinsic k332 evaluation method from HBAR without substrate removal using ratio of dielectric constant εT and εS

Proceedings of Symposium on Ultrasonic Electronics

Online ISSN : 2433-1910
Print ISSN : 1348-8236

1P3-4 Intrinsic k₃₃² evaluation method from HBAR without substrate removal using ratio of dielectric constant ε^T and ε^S

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2024 Volume 45 Pages 37-

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