1P3-8 High overtone mode BAW resonators with polarization inverted multilayer ScAlN/SiAlN films

Proceedings of Symposium on Ultrasonic Electronics

Online ISSN : 2433-1910
Print ISSN : 1348-8236

1P3-8 High overtone mode BAW resonators with polarization inverted multilayer ScAlN/SiAlN films

Kei Fukunaga, Masashi Suzuki, Shoji Kakio

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2024 Volume 45 Pages 41-

DOI https://doi.org/10.24492/use.45.0_1P3-8

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