2P2-10 Method for evaluating mechanical Q<sub>m</sub> factor of thin films using GHz pulse echo technique

Proceedings of Symposium on Ultrasonic Electronics

Online ISSN : 2433-1910
Print ISSN : 1348-8236

2P2-10 Method for evaluating mechanical Q_m factor of thin films using GHz pulse echo technique

Yohkoh Shimano, Takahiko Yanagitani

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2024 Volume 45 Pages 108-

DOI https://doi.org/10.24492/use.45.0_2P2-10

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