Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
3P3-1 Improvement of initial crystallinity and piezoelectricity of c-axis parallel oriented ZnO films grown by DC bias sputtering
Yuya Yoshida, Shinji Takayanagi, Takahiko Yanagitani
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2025 Volume 46 Pages 176-

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