Development of Soft X-ray Absorption Spectroscopic Equipment at Atmospheric Pressure Using He-path with a Free-Standing Membrane as a Partition Wall

Abstract

We have developed a new soft X-ray absorption spectroscopic equipment that can easily and inexpensively measure volatile substances and liquids under atmospheric pressure. This apparatus uses a thin SiN free-standing membrane with a thickness of 100 nm as a pressure partition wall, and puts the sample in a container filled with He gas. Using this apparatus, it is possible to measure soft X-ray absorption spectra of free surface of samples by total electron yield (TEY) and total fluorescence yield (TFY) methods. We measured soft X-ray absorption spectra at the O-K, C-K, and Ti-L-edge under atmospheric pressure for standard solid samples, highly volatile solid sample, and several types of liquid samples such as water.