Ray-Tracing of a Real-Time X-Ray Fluorescence Microscope Considering Excitation X-ray Intensity and Diffraction X-ray Intensity

Abstract

Since the quantitative element distribution can be obtained without scanning the sample by real-time XRF microscopy(R-XRFM), it is described that R-XRFM is particularly useful in the field of biochemistry and material development where in-situ observation is required. Spatial resolution and X-ray intensity distribution of R-XRFM are evaluated by ray-tracing simulation calculation considering the excitation X-ray intensity on the sample surface assuming a point-focus X-ray tube and the diffraction X-ray intensity by the monochromator. The derivation of the formula based on the dynamical theory used for the calculation and the geometrical relationship between the physical quantities and parameters used for the calculation in the reciprocal lattice space are reviewed. In addition, the normalizing coefficient N_s when the analyzed element is dotted on the sample surface and the normalizing coefficient N_p when the analytical element is distributed in a wider range than the pixel size of the detector, are obtained from the simulation calculation.