Our research focuses on the techniques for monitoring the current density distribution of the real-time electroplating and a novel technique to estimate electroplating current densities on plated surfaces from the data of the electric potentials in the plating cells has been developed for LSI fabrication technology. However we have applied with only two dimensional analysis in our previous researches and it limits the application range of the proposed technique. In this research, we applied the monitoring technique with three dimensional analysis. Although the inverse analysis using the three dimensional analysis tends to be large scale, it is important for the practical usage to monitor current density on target region accurately and efficiently. Therefore we have developed an efficient inverse analysis technique for monitoring of the electroplating current density on the target region.

View full abstract

Analysis of plastic deformation for 3types of austenitic stainless steels which have various grain sizes was performed. The 3 methods of calculation were applied to this analysis; Intra-granular Distortion, Grain Orientation Spread and Kernel Average Misorientation. It was found that there were the good correlations between plastic strain and parameters by Intra-granular distortion or GOS, in spite of various grain sizes of the samples. There are also the correlations between plastic strain and result by KAM in each sample, however the KAM values increase with grain size decreasing.

View full abstract