Study on STI planarization process using fixed abrasive tool (1st Report)
Released on J-STAGE: December 28, 2011 |
Volume 70
Issue 1
Pages 128-132
Souichi KATAGIRI, Kan YASUI, Ui YAMAGUCHI, Yoshio KAWAMURA, Ryousei KAWAI, Fumiyuki KANAI, Mitsuo TOKUDA, Minoru HONDA, Shigeo MORIYAMA