Active Flying-height Control of Magnetic Head Slider using MEMS Thermal Actuator
Released on J-STAGE: March 04, 2011 |
Volume 72
Issue 713
Pages 267-273
Masayuki KURITA, Toshiya SHIRAMATSU, Kouji MIYAKE, Atsushi KATO, Masahiko SOGA, Hideaki TANAKA, Show SAEGUSA, Mike SUK