High frequency magnetic properties of Co Zr Nb thin films deposited by dynamic sputtering technique for GHz Si-integrated planar inductors
Released on J-STAGE: May 18, 2010 |
Volume 2
Issue 5
Pages 384-387
B. Viala, O. Valls, P. Gaud, M. Aid, A.S. Royet, R. Cuchet, D. Damiani, M. Ledieu, O. Acher