Ga ion irradiation was used to modify the microstructures and magnetic properties of Co/Pd multilayers and also to fabricate patterned media. A decrease in the diffraction peak at low-angle XRD showed that the regular interface between Co and Pd layers was blurred by ion irradiation. The effective perpendicular magnetic anisotropy energy, K
eff, decreased from 1.7×10
6erg/cm
3 for as-grown film to 0.4 ×10
6 erg/cm
3 for irradiated film at 2×10
15 ions/cm
2. The easy axis of magnetization changed from perpendicular to in-plane atthe highest ion dose (5×10
15 ions/cm
2). An MFM imageshowed that the domain width gradually decreased with increasing ion dose, which corresponds to a decrease in the perpendicular magnetic anisotropy. Sharp boundaries between perpendicular and in-plane regions are also observed in patterned films, which indicates that localized magnetically patterns can be engineered by Ga ion irradiation.
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