Enhancing Hardness and Wear Performance of Diamond-Like Carbon Films through Substrate Cooling during HiPIMS Deposition
Released on J-STAGE: August 31, 2026 |
Volume 21
Issue 3
Pages 250-258
Yuuki Tokuta, Yasuyoshi Saito, Yoshikazu Teranishi, Taishi Uehara, Satoru Habuka, Ryo Sakamoto, Tetsuhide Shimizu