The 77th JSAP Autumn Meeting 2016
Session ID : 14p-P9-6
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 77
Location : [in Japanese]
Date : September 13, 2016 - September 16, 2016
Ohmic contact formation for n+ 4H-SiC substrate by selective heating method using hydrogen radical irradiation
Tetsuji Arai, Kazuki Kamikura, Chiaya Yamamoto, Mai Shirakura, Keisuke Arimoto, Junji Yamanaka, *Kiyokazu Nakagawa, Toshiyuki Takamatsu, Masaaki Ogino, Masaaki Tachioka, Haruo Nakazawa
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