Abstract
Department of Chemistry, Simon Fraser University, Burnaby, British Columbia, Canada, V5A 1S6 The photochemistry of thin films of Ln(O2CCH(C2H5)C4H9) 3 (Ln=La, Dy, Gd, Eu) are investigated as a means to deposit patterned films of the metal oxides of the lanthanides. The films are photosensitive, generating carbon dioxide, heptyl radical and the lanthanide. The lanthanide reacts with oxygen from the air to yield the metal oxide. Two heptyl radicals undergo a hydrogen transfer reaction to yield heptane and heptene. The quantum yields are high and may indicate a chain process. A possible mechanism for the chain process is presented. The use of this method to deposit patterned films is demonstrated by the fabrication of 1.5 μm wide lines by contact mask lithography.
