Advanced Development Techniques for Extreme-Tight Pitch Patterning
Released on J-STAGE: July 31, 2024 |
Volume 37
Issue 3
Pages 245-250
Hikari Tomori, Cong Que Dinh, Seiji Nagahara, Kanzo Kato, Shinichiro Kawakami, Yuhei Kuwahara, Soichiro Okada, Kayoko Cho, Junji Nakamura, Syuuya Yamasaki, Shoichi Terada, Makoto Muramatsu, Alexandra Krawicz, Kathleen McInerney, Nathan Antonovich, Lior Huli