Novel Molecular Resist for EUV and Electron Beam Lithography
Released on J-STAGE: October 05, 2015 |
Volume 28
Issue 4
Pages 537-540
Andreas Frommhold, Dongxu Yang, Alexandra McClelland, John Roth, Xiang Xue, Mark C. Rosamund, Edmund H. Linfield, Alex P. G. Robinson