Dynamic rupture model was proposed to simulate source rupture processes based on physical relationship between the stress and strain field near the fault plane. However, if we use dynamic rupture model for inversion analysis, it is difficult to find a global minimum because of a high nonlinearity caused by the inversion method. We propose a stage by stage inversion process, in which the number of the estimated parameters increase as the stage proceeds, in order to give adequate initial values and to estimate the optimal resolution of the inversion problem.