Hermetic Protection of Rings by Ion Beam Sputter Coating with a Broad Beam Ion Source and a W-Shaped Hollow Sputter Target

Wolfgang Ensinger; Stefan Flege; Ruriko Hatada; Sevda Ayata; Takaomi Matsutani; Koumei Baba

doi:10.14723/tmrsj.38.97

Regular Papers

Hermetic Protection of Rings by Ion Beam Sputter Coating with a Broad Beam Ion Source and a W-Shaped Hollow Sputter Target

Wolfgang Ensinger, Stefan Flege, Ruriko Hatada, Sevda Ayata, Takaomi Matsutani, Koumei Baba

Author information

Keywords: ion beam sputter deposition, ring coating, corrosion, three-dimensional sputter target

JOURNAL FREE ACCESS

2013 Volume 38 Issue 1 Pages 97-100

DOI https://doi.org/10.14723/tmrsj.38.97

Details

Abstract

Since ion-beam-based methods for materials' modification are line-of-sight techniques, it is difficult to coat three-dimensional objects completely. Here, a device is described for coating rings by ion beam sputter deposition. A broad-beam ion source is combined with a sputter target consisting of two cones, forming the shape of the letter W in cross-section. With this technique, steel rings were coated with thin aluminium and chromium films. Adhesion measurements at different ring positions showed that the coatings were well adhering. Electrochemical corrosion tests proved that the coating was able to protect the steel ring from aqueous corrosion.

Corresponding author

Register with J-STAGE for free!