Effect of Plasma Discharging Condition on Growth Behavior of Nano-wire Formed on Tool Steel Substrate

抄録

The influence of plasma discharging conditions on the formation and growth of nano-wires formed on tool steel substrates (JIS: SKH51) was studied. Various sample settings and plasma discharging conditions were employed and the specimen surface was observed by scanning electron microscopy. The plasma discharging involved two steps: predischarging (introduction of Ar) and discharging (introduction of Ar and H₂). Nano-wires were formed on the substrate when the sample setting, pre-discharging, and discharging conditions were appropriate. The growth behavior was influenced by the H₂ flow rates used during discharging and by the pre-discharging and discharging time. The measured top surface substrate temperature during plasma discharging exceeded 700 K when the radio frequency power was 500 W. The top surface substrate temperature was an important factor influencing nano-wire growth. The length and diameter of the nano-wires increased with increase in log(discharging time). We presume that the growth was controlled by diffusion due to the increase in temperature.