Probing Depth Study of Conversion Electron/He Ion Yield XAFS Spectroscopy on Strontium Titanate Thin Films

Abstract

The probing depth of conversion electron/He ion yield XAFS methods has been studied in order to apply these methods to estimate the local distortion of strontium titanate thin films on thick substrates. Several strontium titanate thin film samples with different thicknesses were prepared and the edge-jump amplitudes at both the Sr and Ti K-edges were obtained. The probing depths were estimated to be 300 nm for the Sr K-edge and 30 nm for the Ti K-edge by the conventional exponential fit. The XAFS spectra and the probing depths measured by conversion electron and He ion yield methods is much the same, though the background curves are different.