Abstract
The electric field above specimen surfaces mounted in specimen holders was investigated. After confirming an agreement of the field distortion area obtained from SIMS experiments using a Cameca IMS-4f ion microscope and computer simulation, the field distortions above specimen surfaces of various types of holder were estimated. Two findings were obtained: (i) the field distortion area near to the window edge of the holder increases along with an increase in the faceplate thickness of the holder, and (ii) a holder with a tapered faceplate produces a more uniform electric field than does that with a right-angled window edge.
