Quantitative Estimation Methods for Concentrations and Layer Thicknesses of Elements Using Edge-jump Ratios of X-ray Absorption Spectra

Abstract

This work concerns the development of quantitative estimation techniques using the K edge-jump ratio of X-ray absorption spectrum recorded through total-electron-yield measurements. The three methods of calculation methods proposed here can be used to estimate (1) the bulk elemental composition of homogeneous solid materials, (2) the thickness of the thin layers, and (3) the amounts of atoms implanted by certain acceleration energies. The estimations are based on theoretical photoelectron cross sections of elements, the Auger electron effective range calculated using the stopping power of electrons, and the depth profiles of the elements.