Analytical Sciences
Online ISSN : 1348-2246
Print ISSN : 0910-6340
ISSN-L : 0910-6340
Standard Sample Preparation for the Analysis of Several Metals on Silicon Wafer
Yoshihiro MORI, Kengo SHIMANOE
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Keywords: Total reflection X-ray fluorescence spectrometry, standard sample, silicon wafer, contamination, transition metal, SC-1
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1996 Volume 12 Issue 1 Pages 141-143

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