Abstract
The X-ray diffraction intensity obtained using a thin-film diffractometer has a special angular dependence as a result of its optical arrangement, owing to the absorption of X-rays by a thin-film specimen. In this study we examined in detail the influence of a secondary soller slit and developed a method of date correction so as to produce good agreement between the observed and calculated dependence. This method has been successfully applied to a structural study of WO3 evaporated film specimens.
