QUANTITATIVE ANALYSIS OF SMALL PARTICLES BY SUBMICRON SECONDARY ION MASS SPECTROMETRY

Abstract

Relative sensitivity factors (RSFs) of thirteen elements in oxide glass matrix were determined for a secondary ion mass spectrometry (SIMS) with gallium focused ion beam(FIB). Reproducibility of RSFs was good, sample-to-sample scattering of RSF values was relatively small, and dependence of RSFs on the first ionization potential is reasonable. To check validity of the RSFs, coal fly ash particles and glass fiber sample were analyzed. The results were in reasonable agreement with the data obtained by the bulk chemical analysis.