Crater Shapes in Glow-Discharge Mass Spectrometry with a Grimm-Type Ion Source

Analytical Sciences

Online ISSN : 1348-2246
Print ISSN : 0910-6340
ISSN-L : 0910-6340

Crater Shapes in Glow-Discharge Mass Spectrometry with a Grimm-Type Ion Source

Yong-Nam PAK, Tomokazu TANAKA, Hiroshi KAWAGUCHI

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Keywords: Glow-discharge mass spectrometry, depth analysis, crater shape, Grimm-type, inductively coupled plasma mass spectrometer

JOURNAL FREE ACCESS

1993 Volume 9 Issue 1 Pages 137-139

DOI https://doi.org/10.2116/analsci.9.137

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© The Japan Society for Analytical Chemistry

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