Abstract
In order to measure the piezoelectric properties of the hydroxyapatite(HAp) films, we have fabricated Cu/
HAp/Ti or Cu/HAp/Pt structure. At first, a 1.5μm thick HAp was deposited on a Ti or Pt substrate using the
KrF pulsed laser deposition(PLD) method. After the HAp deposition, the HAp film was crystallized by postannealing
in nitrogen gas atmosphere and cooled slowly in an electric furnace. Then, a Cu top electrode sheet
was attached on the HAp film. Finally, one end of the Cu/HAp/Ti or Cu/HAp/Pt structure was clamped to
compose a vibrating cantilever beam. Piezoelectric coefficients were estimated by output voltage responses of
HAp films measured by a operational amplifier circuit when the Cu/HAp/Ti or Cu/HAp/Pt beam was excited
by a mini-shaker at the first natural frequency of the beam. The results showed the piezoelectricity of the
artificially synthesized HAp films.
