Abstract
This paper describes a new positioning control system with one degree of freedom. The system consists of positioning feedback and pneumatic pressure control. We report on the experimental results of the system and analysis of it. Obtained conclusions are as follows ; (1) The model of the system is approximated by third-order system. (2) This experimental device enables 1(μm) order's control of within 1(%) error. (3) The static stiffness of the device is about 70(kg/μm). (4) The bandwidte which is characteristic of the frequency response becomes about 20(Hz). (5) The natural frequency of the controlled object is 500(Hz) and the damping ratio is 0.03.
